Description Foundations of MEMS is an entry-level text designed to systematically teach the specifics of MEMS to an interdisciplinary audience. Liu discusses designs, materials, and fabrication issues related to the MEMS field by employing concepts from both the electrical and mechanical engineering domains and by incorporating evolving microfabrication technology — all in a time-efficient and methodical manner. A wealth of examples and problems solidify students’ understanding of abstract concepts and provide ample opportunities for practicing critical thinking.
Concise background information from several engineering domains:
Makes students conversant with unfamiliar concepts and practices that are needed to solve MEMS problems.
Presents exciting new opportunities for a student and practitioner of MEMS to become involved in specific application domains, such as bioengineering, chemistry, nanotechnology, optical engineering, power and energy, and wireless communication.
Systematic teaching of materials, design, and fabrication issues, in an ascending and widening spiral introduces topics in an ordered and logical progression.
Critical-thinking challenges foster a deeper understanding of the subject matter and show students how to think like engineers.
Extensive examples and homework problems help teachers explain difficult concepts and assist students in practicing these concepts.
Current data and up-to-date materials keep students and researchers abreast of the latest technologies.
Table of Contents
Chapter 1: Introduction
Chapter 2: First-Pass Introduction to Microfabrication
Chapter 3: Review of Essential Electrical and Mechanical Concepts
Chapter 4: Electrostatic Sensing and Actuation
Chapter 5: Thermal Sensing and Actuation
Chapter 6: Piezoresistive Sensors
Chapter 7: Piezoelectric Sensing and Actuation
Chapter 8: Magnetic Actuation
Chapter 9: Summary of Sensing and Actuation Methods
Chapter 10: Bulk Micromachining and Silicon Anisotropic Etching
Chapter 11: Surface Micromachining
Chapter 12: Process Synthesis: Putting It all Together
Chapter 13: Polymer MEMS
Chapter 14: Micro Fluidics Applications
Chapter 15: Case Studies of Selected MEMS Products